TEM




TEM-STEM | Defect and Materials Analysis | EELS | EDS | Analytical Service Laboratory

FEI Titan 80kV-300kV TEM/STEM

Sub-Angstrom Resolution & Atomic Characterization

Advanced Circuit Engineers (ACE) provides high-tier analytical services via the FEI TITAN platform. Our laboratory specializes in high-fidelity visualization and quantitative chemical characterization for the most demanding material systems. Our instrumentation provides critical data for multi-layer interfaces, quantum wells, lattice dislocations, and high-resolution compositional mapping.

Hardware Aberration-Correction Technology

The FEI Titan at ACE is a Hardware Probe-Corrected instrument. By physically eliminating spherical aberration at the source through a dedicated S-CORR hardware architecture, the system produces an exceptionally coherent, high-current electron probe. This enables sub-angstrom resolution, far exceeding the analytical limits of conventional TEM systems.

Utilizing high-angle annular dark field (HAADF) imaging, we deliver definitive Z-contrast visualization for material differentiation at the atomic scale. This hardware-level precision significantly enhances Electron Energy Loss Spectroscopy (EELS) sensitivity, allowing for the detection of light elements and subtle chemical shifts that are often lost to resolution blur on non-corrected instruments.

Analytical Spectroscopy

  • Light Element Quantification
  • Chemical Bonding & Valency Analysis
  • Atomic-Scale Elemental Distribution
Structural Validation

  • Sub-Å Lattice Imaging
  • Interface & Oxide Stoichiometry
  • Crystallographic Strain Mapping

Service Efficiency

  • Volume-based engagement models
  • Standardized rapid-turnaround
  • Streamlined project logistics

Direct Collaboration: Real-time analyst consultation.

R&D Applications

  • LPCVD / PECVD Deposition Validation
  • Advanced Material Defect Profiling
  • Ultra-thin Film Metrology
  • Microvia Compositional Analysis

Technical Specifications

  • Sub-Å resolution STEM
  • Windowless EDS (0.45sr)
  • EELS Mapping & Tomography
  • 80, 200, 300kV Operation

FEI TITAN CONFIGURATION

TEM Imaging Lab services

System capabilities

  • Variable Acceleration: 80kV to 300kV

  • Sub-Å STEM Resolution via Hardware S-CORR

  • Advanced Multi-Scale Material Characterization

  • Quantitative EELS/EDS Elemental Mapping

  • 3D Tomography & Electron Holography

  • Windowless SDD EDS Detector (0.45sr)

TEM Gallery