The Ebeam system can provide fast, accurate analysis and fault diagnosis of ICs. To generate an image, the IDS 10,000plus uses a finely focused electron beam, which is raster scanned over the surface of the device. The Ebeam strikes the surface of the device, producing secondary electrons, which can be detected and processed to display the image. By holding the beam on a specific conductor, it can function as a sampling oscilloscope, sampling voltage over time on that metal line. Thus, it provides non-loading, non-destructive, high bandwidth, low-noise measurements displayed as waveforms.
